The Titan 80-300 Probe Corrected Monochromated system.

This is a state of the art system for the highest spatial resolution nanoanalysis, with the combined capability of highest spatial resolution offered by the probe corrector, which also enahances the beam current that can be obtained in a small probe, and highest energy resolution offered by the monochromator/HR-GIF combination.  The system allows accelerating voltages between 80kV and 300kV to be selected, so that 'soft' such as polymeric as well as 'hard' such as semiconductor or intermetallic samples can be observed at optimum conditions.  An information limit in TEM mode of 0.7 Angstroms is reached.  In STEM mode the attainable resolution is at least 0.78 Angstroms.  The energy resolution that can be obtained is 0.15eV on the EELS spectrum, illustrating stable total system performance.  This microscope is completely surrounded by an efficient enclosure for reducing acoustic effects and temperature fluctuations, which means the user is effectively removed from the direct vicinity of the microscope.  An Energy Dispersive Spectrometer EDS) is fitted to the column, and by utilizing the TIA software, Imaging, EDS spectroscopy and EELS spectroscopy can be performaed simultaneously to create spectrum images.