The Sirion scanning electron microscope (SEM) is a state of the art high resolution research instrument. It is routinely used to image specimens at very high magnification. This is accomplished using a field emission electron gun (FEG) and a special type of electron detector built inside the final lens. The unique electron collecting efficiency of this detector allows the Sirion to obtain startling high resolution images even at low accelerating voltages.
As well as a normal secondary electron detector this SEM has a Back Scattered Electron Detector (BSD), Energy Dispersive Spectrometer for chemical analysis using x-rays (EDS), and an internal TV camera (CCD).
